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Micro-nano-electro-mechanical systems-nanotechnology Engineering

Objectives


This workshop aims to simulate, manufacture and characterize new types of micro-nano systems sensors using micro- and nanotechnologies.
The main focus of the course is, on the one hand, experimental group work on industrial applications and on the other, to strengthen the link between academic content and the concepts they will need in their future profession. This is done by carrying out a project that is meant to help students organise their knowledge, it allows them to perform a literature review and perform a detailed study of these new sensors which have applications in many areas eg micro- and nanoelectronics, aeronautics, medicine ...
The following topics will be covered:
- MEMS / NEMS Modelling course
- Lab-work on multi-physics simulations (e.g. COMSOL)
- Production of MEMS in the AIME clean room (1/2 process)
- Lab-work on MEMS probing characterization
- MEMS / NEMS Project defense

Needed prerequisite


Semiconductor physics and microsystems Basic knowledge in solid state physics (Master 1)

Form of assessment

The evaluation of outcome prior learning is made as a continuous training during the semester. According ot the teaching, the assessment will be different: as a written exam, an oral exam, a record, a written report, peers review...