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Materials physics and applications in microelectronics

Presentation

Programme (detailed contents):

The teaching is divided into two parts: firstly, an introduction to the physical properties of materials and their applications; secondly, an introduction to technologies for integrated circuits.

Part I: Introduction to the physical properties of materials

v  Introduction / Structures and ordering in condensed matter / Mechanical properties of crystallized materials / Glasses and amorphous materials / Electronic properties of materials and their applications (electronic and thermal conduction, dielectric, magnetic and optical properties).

Part II: ITEI

v  An introduction to the physics of semiconductors, operation of the PN junction and microelectronics (diffusion, oxidation, photo, etching,...), the lecture is followed by lab-work in a cleanroom for the manufacture of a silicon diode with characterisation of each step and final electrical test. There follow two tutorials on calculating other semi-conductors parameters: doping, mobility, lifetime, diffusion length, effective mass, dielectric relaxation, influence of doping on resistivity, conductivity and finally make use of the results obtained from the diode PN-cleanroom experience.

v  The cleanroom practical work (TP) covers the manufacture, testing and assembly of a PN diode and a practical introduction to computer aided design (CAD): ATLAS (circuit simulation), ATHENA (layout + technological steps).

 

Organisation:

Part I:

v  25h lecture with course material given to students,

v  alternating with 12h30 of TD

Part II:

v   Lectures and tutorials represent 6h15 and 2h30 respectively. Handouts of lecture notes are given to students.

v  Practical work consists of two parts:

  • - One lab session in microelectronics clean room (AIME) organised as 2 half days per student (7h), with a final test of the device done in pairs together with other pairs throughout the week.
  • Practical work of one-half day (3h) per student covering computer aided design CAD.
  • A handout for clean room practical work describes the procedures to be carried out and some theory relating to physical and chemical processes.

v  This course may possibly be opened in an "e-learning" version, depending on the student audience and the difficulties they encounter. This course is available online on the Moodle platform of INSA Toulouse: https://moodle.insa-toulouse.fr/ login/index.php

Objectives

At the end of this module, the student will have understood and be able to explain (main concepts):

  •  

The student will be able to:

v  Describe the main macroscopic properties of materials (mechanical, electronic, thermal, magnetic, dielectric and optical) and relate them to microscopic structure  the atomic and electronic effects.

v  Master the basics of semi-conductor physics and the physical and chemical processes in microelectronics.

v  Simulate, manufacture (in cleanroom) and test an elementary component, such as a PN junction.

v  These three objectives involve both experimental training and theoretical courses.

Needed prerequisite

No required knowledge
The materials course and ITEI must be completed before the cleanroom AIME
lab-work. The ITEI tutorials will use the results from the AIME lab-work. They must be
done after the lab-work.

Form of assessment

The evaluation of outcome prior learning is made as a continuous training during the semester. According ot the teaching, the assessment will be different: as a written exam, an oral exam, a record, a written report, peers review...

Benefits

Handout (whole course) (Part II)

Science et Génie des matériaux, W.D. Callister, Ed Dunod

Introduction à la science des matériaux, Traité de matériaux Vol1, W. Kurz & al. Ed Presses Polytechniques et Universitaires Romandes

Dispositifs et circuits intégrés semiconducteurs; A. Vapaille et R. Castagné; Dunod - 1987 - ISBN 2-04-016522-3.

Physique des semiconducteurs et des composants électroniques : H. Mathieu, ed. Dunod ISBN10: 2-10-051643-4, ISBN13 : 978-2-10-051643-8,

Semiconductor Devices: Physics and Technology, 2nd Edition, Simon M. Sze, ed. Wiley ISBN-10: 0471333727, ISBN-13: 978-0471333722