logo Insalogo Insa

Micro-nano-electro-mechanical systems-nanotechnology Engineering


Designing new addressable sensors (eg accelerometer, thermal actuators, micromirrors, ...) for the implementation of micro-nanosystems. These basic elements and the circuit elements needed to address will be integrated into a single chip using a CMOS compatible process. The integrated component is then performed in a clean room and will test the success of each step in implementing the appropriate physical characterization methods. At the end of the process, they proceed to complete electrical characterization of chip made.



1 - MEMS Modeling Courses:

This course introduces the general concepts of MEMS and all the modeling techniques, especially the finite element method. These techniques are then developed in the construction of the following simulations.


2 - Simulation labworks :

Define techniques and methodologies for implementation of microsystems assembly based on a CAD industry (eg Cadence, Coventor ...). The multi-physics simulation (eg COMSOL) is then privileged to design innovative sensors and actuators in silicon.


3 - Micro-Nanofabrication MEMS:

Implementation and integration of cleanroom simulated sensors, also with the circuit elements needed to address them.


4 – Labwork on characterization by probing tests:

Test the viability and define the characteristics of simulated sensors and manufactured by the technique of probing tests. The comparison between theoretical and experimental characteristics is developed.


5 - Micro / nanosystems Project:

The project aims structuring throughout the semester via all the concepts covered and leads to a defense in front of the student classroom.


Several "free" homework are included in the schedule so that students can complete the characterization offer (eg the atomic force microscope (AFM), scanning electron microscopy (SEM), ...).


This workshop aims to simulate, manufacture and characterize new types of micro-nano systems sensors using micro- and nanotechnologies.
The main focus of the course is, on the one hand, experimental group work on industrial applications and on the other, to strengthen the link between academic content and the concepts they will need in their future profession. This is done by carrying out a project that is meant to help students organise their knowledge, it allows them to perform a literature review and perform a detailed study of these new sensors which have applications in many areas eg micro- and nanoelectronics, aeronautics, medicine ...
The following topics will be covered:
- MEMS / NEMS Modelling course
- Lab-work on multi-physics simulations (e.g. COMSOL)
- Production of MEMS in the AIME clean room (1/2 process)
- Lab-work on MEMS probing characterization
- MEMS / NEMS Project defense

Needed prerequisite

Semiconductor physics and microsystems Basic knowledge in solid state physics (Master 1)

Form of assessment

The evaluation of outcome prior learning is made as a continuous training during the semester. According ot the teaching, the assessment will be different: as a written exam, an oral exam, a record, a written report, peers review...