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Micro-nano technologies


Programme (detailed contents):


Micro. : Complete micro-electronic formation including physico-chemistry lectures on the processes used in micro-electronics, training for the design, conception and simulation of the devices by Computer Aided Design (C.A.D.), and finally an application  training period in clean room for the realisation of semiconductors devices (NMOS...) and memory components based on Silicon nanocrystals  (e.g. FLASH)


At the end of this module, the students should be able to:


- Design and simulate micro- and nano-electronic devices by computer aided design.

- know the main fabrication processes of the microelectronics industry (physical and chemical principles, associated design rules)

- use this processes in a clean room to fabricate CMOS devices and integrated circuits

- test the manufactured devices with electrical and physical characterization

Form of assessment

The evaluation of outcome prior learning is made as a continuous training during the semester. According ot the teaching, the assessment will be different: as a written exam, an oral exam, a record, a written report, peers review...